FIELD: instrumentation. SUBSTANCE: proposed process can be used in mechanical and instrumentation engineering, machine tool manufacture, automotive and other branches of industry. Laser beam is directed on to illumination system and after it on to acoustooptic modulator. Traveling acoustic pulse is excited in acoustooptic modulator to form uninterrupted sequence of diffraction orders. Lens set after acoustooptic modulator carries out conversion of translational ray path to angular one. Spatial filtration of diffraction orders is realized by diaphragm. Collimating lens directs scanning rays on to measured article. Collecting lens focuses passed-through rays on to photodetector. Signal from photodetector goes to unit of auxiliary electronics. Size of element of surface is determined by time interval during which scanning ray is shaded by article. EFFECT: enhanced precision and measurement speed. 1 dwg
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Authors
Dates
2000-10-27—Published
1999-03-01—Filed