PROCESS OF GAS ANALYSIS AND IONIZATION DETECTOR FOR ITS IMPLEMENTATION Russian patent published in 2003 - IPC

FIELD: determination of composition of gas mixtures, quantitative and qualitative analysis of impurities in main gas. SUBSTANCE: impurities are found by way of analysis of energy of electrons formed by ionization of atoms or molecules of impurities in collision with particles of certain energy in which capacity metastable atoms or molecules of main gas can be employed as well as monochromatic photons from outside source. Analysis of energy of electrons formed by collision of impurities with metastable atoms in afterglow of plasma ignited between flat anode and cathode is conducted by way of obtainment of second derivative of current depending on applied voltage. Additional grid between anode and cathode can be used for analysis of energy of electrons or outside ultraviolet radiation source can be utilized instead of plasma. Distance between electrodes and gas pressure are so selected that distortions of measured values of energy of electrons do not exceed specified level. EFFECT: possibility to conduct qualitative and quantitative analysis in wide range of pressures. 40 cl, 8 dwg