FIELD: instrument making.
SUBSTANCE: gas-discharge plasma restricted with cathode, anode and walls is created; pressure of the main gas and spatial configuration of electrodes and walls is chosen so that distance from any point inside plasma to the nearest surface of anode or wall is les than average length of movement of electrons till the moment of loss of the specified portion of kinetic energy; number of electrons is determined with characteristic values of energy, which appear at ionisation of the above atoms or molecules of impurity; composition of impurities is judged by parameters of those electrons; at that, stationary plasma combustion mode is supported and current value is measured at least on one additional electrode installed in ionisation chamber in near-anode area, depending on the changed negative pressure applied between the above electrode and anode; the number of electrons with characteristic values of energy is determined by processing of measured dependence of current on additional electrode on the applied voltage.
EFFECT: invention allows performing qualitative and quantitative analysis of wide-class substances contained in gas phase in large range of pressures up to atmospheric and higher in stationary gas-discharge plasma.
22 cl, 4 dwg
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Authors
Dates
2011-06-27—Published
2009-11-26—Filed