FIELD: evaporation technique and technology; production of carbon nanopipes. SUBSTANCE: invention relates to deposition of films by magnetron sputtering in vacuum and is used for production of carbon nanopipes. Carbon films are sputtered in a vacuum chamber. The method of magnetron sputtering with application of a direct current is used. Pressure of an inert gas in the chamber is kept of (1-5)•10-2 torr. Direct-current power supply to the target is 40-100 mA. EFFECT: The invention upgrades quality of the produced nanopipes, improves their structural properties, productivity and the films adhesion. 2 dwg
| Title | Year | Author | Number |
|---|---|---|---|
| METHOD FOR CREATING TRANSPARENT CONDUCTIVE COMPOSITE NANO-COATINGS (OPTIONS) | 2016 |
|
RU2661166C2 |
| METHOD OF CARBON NANOSTRUCTURES PREPARATION | 2007 |
|
RU2355625C1 |
| METHOD OF OBTAINING CARBON NANOSTRUCTURES (VERSIONS) AND DEVICE FOR ITS REALISATION (VERSIONS) | 2011 |
|
RU2516198C2 |
| METHOD OF MAKING PROBES WITH CARBON NANOTUBES | 2008 |
|
RU2369938C1 |
| METHOD FOR CREATING QUANTUM DOTS FOR ELEMENT BASE OF RADIO ENGINEERING | 2020 |
|
RU2753399C1 |
| CARBON NANOTUBES | 2010 |
|
RU2442747C2 |
| METHOD OF SPRAYING ELECTRICALLY CONDUCTING METAL-CARBON MULTILAYER COATING ON TAPE SUBSTRATE MADE OF NONWOVEN FIBROUS MATERIAL | 2017 |
|
RU2677551C1 |
| METHOD OF PRODUCTION OF CARBON NANO-TUBES | 2005 |
|
RU2294892C1 |
| METHOD FOR APPLYING ELECTROCONDUCTING NANO-COMPOSITE COATINGS CONTAINING METAL IN SILICON-CARBON MATRIX | 2006 |
|
RU2297471C1 |
| METHOD OF APPLICATION OF A NANOFILM COATING ON A SUBSTRATE | 2018 |
|
RU2681587C1 |
