FIELD: chemistry.
SUBSTANCE: invention refers to the methods of carbon nanostructures preparation such as carbon globules and carbon nanotubes of various forms which can be used in nanoelectronics as parts of electronic microcircuits and devices on their basis containing submicron working parts (nanotransistors, nanodiodes, nanokathodes). The method of carbon nanostructures preparation includes magnetron spraying of the carbon films with nanotubes on the substrate at direct current in vacuum chamber in the inert-gas atmosphere using the substrate designed with defined protruding surface asperities. Prior to magnetron spraying the catalyst in the form of the thin metal film is applied on the substrate.
EFFECT: preparation of various forms of nanotubes such as X-form and Y-form as well as globules of the vertically oriented nanotubes.
9 dwg
| Title | Year | Author | Number |
|---|---|---|---|
| METHOD OF OBTAINING CARBON NANOSTRUCTURES (VERSIONS) AND DEVICE FOR ITS REALISATION (VERSIONS) | 2011 |
|
RU2516198C2 |
| METHOD OF MAKING PROBES WITH CARBON NANOTUBES | 2008 |
|
RU2369938C1 |
| METHOD FOR CREATING QUANTUM DOTS FOR ELEMENT BASE OF RADIO ENGINEERING | 2020 |
|
RU2753399C1 |
| METHOD OF PRODUCTION OF CARBON NANO-TUBES | 2005 |
|
RU2294892C1 |
| A METHOD TO PRODUCTION OF CARBON NANOPIPES | 2002 |
|
RU2218299C1 |
| METHOD OF SPRAYING ELECTRICALLY CONDUCTING METAL-CARBON MULTILAYER COATING ON TAPE SUBSTRATE MADE OF NONWOVEN FIBROUS MATERIAL | 2017 |
|
RU2677551C1 |
| COATING FOR PHOTOVOLTAIC CELL AND METHOD OF MAKING SAME | 2014 |
|
RU2577174C1 |
| METHOD FOR FORMING NANO-(MICRO-)SYSTEMS FROM CARBON NANOTUBES | 2005 |
|
RU2306257C1 |
| NANOSTRUCTURE, PRECURSOR OF NANOSTRUCTURE AND METHOD OF FORMING NANOSTRUCTURE AND PRECURSOR OF NANOSTRUCTURE | 2006 |
|
RU2406689C2 |
| DEVICE FOR MEASURING SIZES OF NEEDLE TIP FOR SCANNING MICROSCOPE | 2006 |
|
RU2308414C1 |
