FIELD: physics.
SUBSTANCE: invention relates to vacuum technology and the technology of making carbon nanotubes, such as carbon nanotubes at ends of probes, which are used in probe microscopy for precision scanning. The method of making probes with carbon nanotubes is realised by depositing carbon films with nanotubes through magnetron sputtering in a vacuum at direct current of 100-140 mA using a carbon target with a nanotube growth catalyst. Work pieces of the probes are put into a vacuum installation. A carbon film with nanotubes is then sputtered in a residual atmosphere of inert gas.
EFFECT: invention allows for obtaining probes with carbon nanotubes, lying perpendicular the surface of the probe, in required amounts without using explosive substances and complex devices.
6 dwg
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