METHOD FOR CREATING TRANSPARENT CONDUCTIVE COMPOSITE NANO-COATINGS (OPTIONS) Russian patent published in 2018 - IPC B82B3/00 C23C28/00 C23C14/14 C23C14/35 C03C17/09 

FIELD: technological processes.

SUBSTANCE: invention relates to a method for creating transparent conductive composite nano-coatings (variants). In the first variant, chemical deposition of a thin film of carbon nanotubes is preliminarily carried out on a heated substrate. Reactive magnetron sputtering of the metal target is carried out in an atmosphere of a gaseous mixture of inert and reactive gases, with an indium oxide coating deposited on the substrate. In reactive magnetron sputtering, a pure indium target is used, and a gas mixture with an inert gas content and 30 % oxygen is used as said gas mixture. According to the second variant, the nano-micronet is first applied to the substrate by the method of cracking polymer templates using liquid silica and by spraying a metal with electronic conductivity. Reactive magnetron sputtering of the metal target is carried out in an atmosphere of a gaseous mixture of inert and reactive gases, with the deposition of an indium oxide coating on the substrate. Reactive magnetron sputtering uses a pure indium target and a gas mixture containing 21 % oxygen in it.

EFFECT: decrease in the surface resistance of transparent conductive coatings with electronic conductivity, as well as the production of a transparent conductive coating with hole-type conductivity.

2 cl, 1 dwg, 2 ex