METHOD OF SPRAYING ELECTRICALLY CONDUCTING METAL-CARBON MULTILAYER COATING ON TAPE SUBSTRATE MADE OF NONWOVEN FIBROUS MATERIAL Russian patent published in 2019 - IPC C23C14/35 

FIELD: technological processes.

SUBSTANCE: invention relates to the deposition of an electrically conductive metal-carbon multilayer coating on a tape substrate made of nonwoven fibrous material, comprising the flow of working gas into a vacuum chamber with a substrate and ion-plasma deposition of coating layers on a tape substrate moving at constant speed with magnetron sputtering. Spraying of the coating layers onto a tape substrate moving at a constant speed is carried out by means of at least two magnetrons containing targets made of metal and carbon. Magnetrons are supplied with a constant voltage in a pulsed mode by asymmetrically switching the supply voltage on the target with a time-out ratio on a metal target longer than on a carbon target, until molecular layers of metal-carbon coating on a given substrate are obtained.

EFFECT: ensures uniformity and uniformity of coverage.

5 cl, 5 dwg, 2 tbl