GEAR TO MACHINE SEMICONDUCTOR PLATES Russian patent published in 2004 - IPC

FIELD: manufacture of semiconductor devices, washing of semiconductor plates.

SUBSTANCE: gear to machine semiconductor plates have bath, rotor of centrifuge with holders for plates installed in bath, orientation unit put on shaft of rotor, electric motor drive. Gear is supplemented with mechanism of preliminary orientation produced in the form of disk with slit interacting with photodetector and mounted on shaft of rotor and locating arm coming in the form of lever mounted for horizontal movement in bushing anchored on rotor with the help of nut and lock pin. One end of lever is fitted with axle which carries two rotating rollers and second end of lever comes in the form of U-shaped groove in which roller on bracket is mounted for horizontal movement. Roller interacts in turn with walls of above-mentioned groove. Orientation unit comes in the form of disk with cut-away part having shape of segment. Plane of cut of orientation disk interacts with two bearings anchored on axles of holders mounted for reciprocating movement. Bushing of rotor has hole with fixing ball and corresponding conical recess is made in lever and each holder of rotor is provided with circular groove with starting cone.

EFFECT: potential for bilateral vertical machining of plates, prevented destruction of plates and good quality pf washing of plates with reliable operation under automatic mode.

7 dwg