DEVICE FOR MACHINING OF SEMICONDUCTOR PLATES Russian patent published in 2007 - IPC H01L21/302 

FIELD: production of pieces of electronics, applicable, for example, in operations of cleaning of semiconductor plates with the aid of brushes and mega sound.

SUBSTANCE: the device has loading and unloading holders, mechanisms of their vertical motion, mechanism for extraction of the plate from the holder, mechanism for loading of the machined plate in the holder, mechanism of horizontal motion of the plates, machining unit actuating the centrifuge installed in the process bath, brush. The mechanism of vertical motion of the unloading holder is installed at an angle to the horizontal plane in the direction of the plates feed, and the mechanism for extraction of the plates from the holder and the mechanism for loading of machined plates in the holder are made in the form of a suction cup with a vacuum table installed on a carriage for longitudinal motion, the suction cup of the mechanism for extraction of the plates from the holder is installed for turning on the carriage through a preset angle, the carriage is fastened at the same angle to the horizontal plane as the mechanism of vertical motion of the unloading holder, besides, the mechanism of horizontal motion of plates is made in the form of two manipulators for turning in the horizontal plane, each manipulator is provided with a carrier in the form of a ring with an inner tapered surface.

EFFECT: enhanced reliability of device operation and quality of machining, simplified construction.

2 cl, 9 dwg