FIELD: measuring technique, namely laser, fiber interferometry, possibly controlling geometry parameters of body objects in coordinate-measuring machines in machine engineering, machine tool construction and instrument making.
SUBSTANCE: method comprises step of creating three-dimensional space-sensitive spherical surface with radius in angular sector equal to sol. rad. Said surface serves as measuring tip of measuring head. Time moment of virtual touching of said surface with controlled part is detected according to achieving maximum value of outlet signal. By introducing control signal it is possible to correct changes of optical parameters of device caused by influence of environment (temperature, humidity, pressure) or to realize modulation of radius of space-sensitive sphere. It is alike to "breathing" of space-sensitive sphere and may be used for enhancing rate of touching investigated surface. Method is suitable for controlling geometry parameters of polished and high-reflection surfaces, almost mirror ones and also of rough surfaces with low reflection index.
EFFECT: enlarged functional possibilities, determination of geometry parameters characterizing volume of articles.
4 cl, 6 dwg
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Authors
Dates
2004-09-10—Published
2000-08-14—Filed