TEST STRUCTURE FOR GRADUATING SCANNING PROBING MICROSCOPE Russian patent published in 2005 - IPC

Abstract RU 2244254 C2

FIELD: microscopy.

SUBSTANCE: device has base and artificial orderly microstructures on it with known geometric parameters, as artificial microstructures nano-spheres or micro-spheres are used, outer surface of which is covered with conductive layer.

EFFECT: broader functional capabilities, higher efficiency.

4 cl, 4 dwg

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RU 2 244 254 C2

Authors

Bykov V.A.

Evplov D.A.

Emel'Chenko G.A.

Masalov V.M.

Medvedev B.K.

Redchenko V.V.

Saunin S.A.

Dates

2005-01-10Published

2003-02-28Filed