TEST OBJECT FOR CALIBRATION OF RASTER ELECTRON AND SCANNING PROBE MICROSCOPES Russian patent published in 2008 - IPC G01B15/00 

FIELD: physics.

SUBSTANCE: invention pertains to the field of measuring small sections, which characterise the geometrical parameters of the profile of the topographical features of the surface of a solid body. The measurements are done in the nano-meter range (1-1000 nm) using raster electron and scanning probe microscopes. The test object is in the form of a structure with a topographical surface, the features of which have a profile, with projections of their sides on the base plane, which are larger than the probes of the raster electron and scanning probe microscopes. For all features there is an acute angle between the side edge and the lower base plane, in which case the projection is in the form of a set of steps, at least two of which join at an angle not equal and not a multiple of 180°.

EFFECT: increased accuracy of measurements and broadening of functional properties of the proposed structure.

3 cl, 2 dwg