TEST STRUCTURE FOR CALIBRATION OF SCANNING SOUNDING MICROSCOPE Russian patent published in 2000 - IPC

FIELD: tunnel and atomic power microscopy. SUBSTANCE: proposed test structure for calibration of scanning sounding microscope is made of base with microstructures arranged on it. Microstructures have two or more sections parallel to base placed at different distances from base. Structure ensures calibration of scanning sounding microscope both in horizontal plane and along axis normal to base. It also allows calibration of scanning sounding microscope in horizontal plane to be conducted in shortest time thanks to scanning of not entire area occupied by microstructure on base of test structure but of two sections corresponding to fast and slow directions of scanning only under condition that sought-for scaling coefficient along horizontal axis depends on deviation of needle of scanning sounding microscope from base of test structure. EFFECT: improved efficiency of test structure. 14 dwg