METHOD OF PREPARING POROUS SILICON STRUCTURE Russian patent published in 2005 - IPC

Abstract RU 2245298 C2

FIELD: interaction substance technology.

SUBSTANCE: preparation of porous nanostructure of silicon consists in forming pores in silicon-containing base wherein silicon is present in the form of one of three stable isomers, summary content of the two remaining isotopes not exceeding half their natural occurrence. For example, if 28Si is present, base can include 29Si and 30Si isotopes in sum not exceeding 3.5%; if 29Si is present, base can include 28Si and 30Si isotopes not exceeding in sum 47%; and if 30Si is present, base can include 28Si and 29Si isotopes not exceeding in sum 48%.

EFFECT: increased atomic homogeneity of porous silicon nanostructure resulting in improved quality of porous layer, which enables realization of certain nuclear physical effects.

4 cl, 2 ex

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RU 2 245 298 C2

Authors

Golikov V.V.

Tikhomirov A.V.

Dates

2005-01-27Published

2002-02-28Filed