SCANNING PROBE MICROSCOPE WITH AN EQUIVALENT OF SCANNER Russian patent published in 2005 - IPC

FIELD: scanning probing microscopes.

SUBSTANCE: scanning probing microscope with equivalent of scanner contains a pipe scanner, scanner equivalent, made in form of mechanically independent pipe elements of displacements. Scanner equivalent contains movement sensors. Scanner and equivalent movements elements are connected to control block. Mutual position of control electrodes of mechanically independent element of scanner equivalent displacements is like mutual position of control electrodes of appropriate scanner element. Via proportional alternation of value of control signal, equality of structure of electric fields in materials of scanner element and appropriate scanner equivalent element and likeness of their displacements is provided for.

EFFECT: higher scanning precision.

1 cl, 5 dwg