FIELD: physics.
SUBSTANCE: invention is also meant for use with a scanning probe microscope when analysing micro- and nano-relief of a surface. The scanning probe microscope has a vibration-insulating base, a precise positioning drive which provides detectable interaction between a probe and a sample, a probe detection mechanism and a feedback mechanism, which enables to adjust distance separating the probe and the sample, as well as a hexa-axial approaching and positioning mechanical system, a programmable measurement and displacement control unit and a measurement sensor with a feedback mechanism.
EFFECT: broader functional capabilities of the scanning probe microscope owing the possibility of operation of the microscope with large and irregularly shaped samples though the required sample positioning and measurement of the distance between the probe and the sample.
1 dwg
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