PROCEDURE OF MOVEMENT OF SONDE OF SCANNING MICROSCOPENANOLITHOGRAPH IN FIELD OF COARSE X-Y POSITIONER Russian patent published in 2002 - IPC

FIELD: precision measurement technology, nanotechnology. SUBSTANCE: this approach is meant for use in scanning sounding microscope, in sounding nanolithograph and in sounding storage of large capacity. According to procedure first movement is conducted with the aid of precision positioner till boundary of its range is reached. Then search and referencing of sonde to nearest peculiarity of surface is carried out. After it coarse positioner carries out movement in such direction that precision positioner following it moves to opposite boundary of its range. When this boundary is reached sequence of actions described above is repeated cyclically till moment of arrival of sonde to point on surface remote from initial point by specified distance is determined. EFFECT: increased precision and linearity of positioning of sonde over large area of surface of specimen. 1 dwg