FIELD: nanotechnology; three-coordinate displacement devices.
SUBSTANCE: proposed displacement device that can be used, for instance, as scanner in probe microscopy has base with integrated assembly of one-coordinate (Z) displacement unit secured on one end and unit for displacement in two perpendicular coordinates (X, Y) that mounts object holder coupled on other loose end; mentioned base is provided with newly introduced stops disposed through clearances opposite mentioned loose end of integrated assembly and object holder; these clearances do not exceed functional displacement distance of integrated assembly and object holder in direction of respective stops but are smaller than maximum permissible ones with respect to integrated assembly deviation in same directions.
EFFECT: enhanced reliability and metrological quality of device.
7 cl, 7 dwg
| Title | Year | Author | Number |
|---|---|---|---|
| SCANNING PROBING MICROSCOPE COMBINED WITH OPTICAL MICROSCOPE | 2002 |
|
RU2244332C2 |
| SCANNING PROBE NANOTOMOGRAPH WITH OPTICAL ANALYSIS MODULE | 2016 |
|
RU2645437C1 |
| SCANNING PROBE MICROSCOPE | 2006 |
|
RU2366008C2 |
| DEVICE FOR SAMPLE SHIFT | 2005 |
|
RU2377620C2 |
| SCANNING PROBE MICROSCOPE COMBINED WITH DEVICE OF OBJECT SURFACE MODIFICATION | 2012 |
|
RU2572522C2 |
| METHOD FOR SCANNING OBJECTS BY MEANS OF SCANNING PROBING MICROSCOPE | 2004 |
|
RU2282902C2 |
| METHOD FOR MEASURING SURFACE OF OBJECT IN SCANNING PROBE MICROSCOPE MODE | 2015 |
|
RU2597959C1 |
| SCANNING PROBING MICROSCOPE, COMBINED WITH DEVICE FOR MODIFYING SURFACE OF OBJECT | 2005 |
|
RU2282257C1 |
| MULTIFUNCTION PIEZOSCANNER AND SCANNING METHOD FOR PROBING MICROSCOPY | 2003 |
|
RU2248628C1 |
| SCANNING PROBE MICROSCOPE COMBINED WITH SAMPLE SURFACE MODIFICATION DEVICE | 2017 |
|
RU2653190C1 |
