FIELD: laser engineering.
SUBSTANCE: proposed excimer laser that can be used for intracavitary therapy in medicine, for microelectronics, laser chemistry, and processes using heavy-power ultraviolet rays has electrode system, pulse power circuit with storage capacitor, and switch in the form of thyratron. Electrode system has insulating plate that carries electrodes; thyratron is connected in series with storage capacitor and electrode system. Electrode system is designed to ensure pumping of excimer gas medium with discharge creeping over insulating plate surface.
EFFECT: enhanced pulse repetition rate, reduced gas medium consumption.
1 cl, 2 dwg
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