POWERFUL PULSE-PERIODIC EXCIMER LASER FOR TECHNOLOGICAL APPLICATIONS Russian patent published in 2016 - IPC H01S3/225 H01S3/977 

FIELD: laser engineering.

SUBSTANCE: excimer laser comprizes an outer body, framing filled with working medium laser chamber with gas-dynamic channel, two gas-discharge modules, pumping system and cooling system of gas flow through these modules and power supply system of gas-discharge modules. Each gas-discharge module has a high-voltage and grounded electrodes and UV pre-ionizer, equipped with system for generating an extended homogeneous complete discharge, sliding over the surface of the dielectric plate. Laser has two dielectric cylindrical containers, filled with electrically strong gas installed inside the external cylindrical case parallel to each other at a distance, providing arrangement between them of two gas-discharge modules, or includes external elliptical body and one dielectric cylindrical container filled with electrically strong gas, installed inside the outer body in its middle part with gaps relative to inner surface of said case to allow arrangement in these gaps of two gas-discharge modules. Elements of power supply system of gas-discharge modules are arranged inside the dielectric container.

EFFECT: increase of average power of the laser.

30 cl, 8 dwg