FIELD: multi-parameter control.
SUBSTANCE: method includes forming low-temperature plasma for ionization of gas environment in said volume, two-electrode converter is excited in turns by currents of not less than two different fixed resonance frequencies for forming of different strengths of electromagnetic field near electrodes in accordance to number of fixed frequencies. During scanning of plasma area by converter electric conductivities between electrodes of converter on fixed frequencies and on basis of conduciveness gas composition and also other micro-admixtures are detected and evaluated in volume of environment.
EFFECT: broader functional capabilities, higher efficiency.
3 dwg
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Authors
Dates
2005-07-20—Published
2004-02-25—Filed