PIEZOELECTRIC TRANSDUCER AND ITS MANUFACTURING PROCESS Russian patent published in 2005 - IPC

FIELD: measurement technology; measuring electrical quantities of impulse mechanical loads in vibroacoustics and explosion physics.

SUBSTANCE: proposed piezoelectric transducer has two identical insulating wafers made of ferroelectric piezofilm. Each wafer has separate polarized region with electrodes disposed on its opposing surfaces that functions as sensing element of transducer. Polarization vector of wafers is perpendicular to electrodes. Measuring current leads in the form of plane-parallel strips are deposited on opposing surfaces of piezofilm and electrically connected to electrodes. Both wafers are connected through their surfaces to unipolar electrodes symmetrically to one another. External and internal measuring current leads formed in this way are electrically interconnected in pairs and their transverse dimensions are chosen from expression α > w + 2b, where α is width of external current leads; w is width of internal current leads; b is distance between external and internal current leads. Proposed process for manufacturing piezoelectric transducer includes formation of transducer sensing element by separating desired region on insulating wafer made of ferroelectric piezofilm, disposition of electrodes on its opposing surfaces, and deposition of measuring current leads in the form of plane-parallel strips electrically connected to electrodes onto opposing surfaces of wafer. Two identical wafers are connected through their surfaces to unipolar electrodes symmetrically to one another. Measuring current leads are formed on each wafer by enlarging areas of respective electrodes. External and internal measuring current leads are electrically interconnected in pairs.

EFFECT: enhanced yield and quality of transducers, enhanced immunity to electromagnetic stray pick-up, enlarged functional capabilities.

2 cl, 4 dwg