HOLLOW CATHODE TARGET AND METHOD OF MANUFACTURE OF SUCH TARGET Russian patent published in 2005 - IPC

FIELD: spraying targets and methods of manufacture of such targets.

SUBSTANCE: proposed method includes making the blanket of metal to be sprayed which contains tantalum, niobium or their alloy, performing cold cross rolling of blank and cold treatment of rolled blank for obtaining shaped blank. Proposed target is made by above method; it contains at least one rectifying metal. Target is designed for magnetron with hollow cathode and is characterized by the following parameters: (a) size of grain acc. to ASTM 5 or finer; (b) combined texture (111)-(100); (c) homogeneous size of grains varying within ±2 acc. to ASTM or their combination. Assembly of spraying target includes target proper and upper part made from non-sprayable material and secured to side walls of target and/or outer envelope made from non-sprayable material and secured to target. Proposed method of extraction of rectifying metal from used target assembly includes hydrogenation of rectifying metal.

EFFECT: smooth destruction of target and smooth precipitation of material on substrate.

57 cl, 5 dwg, 2 tbl, 1 ex