METHOD FOR MANUFACTURING CATHODES FOR MAGNETRON SPUTTERING INSTALLATIONS MADE OF REFRACTORY METALS Russian patent published in 2021 - IPC B23H5/04 B23H7/02 B23B1/00 C23C14/34 

FIELD: mechanical engineering.

SUBSTANCE: invention relates to the field of mechanical engineering, in particular to the processing and manufacture of parts. The method includes electroerosive processing of the workpiece in the form of a rod on a wire-cutting machine with numerical control (CNC), which ensures dimensional accuracy, taking into account allowances for subsequent machining, in which a disk is cut off from the rod. After electroerosion treatment, the resulting disk is finished by sequentially removing the allowance from 0.007 to 0.015 mm on a CNC lathe in two installations on each side, ensuring a surface roughness of Ra 0.4 mm and the absence of a defective layer on the cathode surface.

EFFECT: invention provides the production of cathodes from refractory metals for magnetron sputtering installations with the required parameters of chemical composition and surface roughness while minimizing waste.

1 cl, 8 dwg, 1 ex