GOLDEN SPRAYED TARGET Russian patent published in 2022 - IPC C23C14/34 C22F1/14 

FIELD: electrical engineering.

SUBSTANCE: group of inventions relates to a golden sprayed target and a method for its manufacture, which can be used, for example, in quartz generators for the manufacture of excitation electrodes with sprayed Au film. The golden target is made of gold and unavoidable impurities, and it has a surface to be sprayed. In the golden sprayed target, an average value of Vickers hardness is 40 or more and 60 or less, and an average size of a crystal grain is 15 mcm or more and 200 mcm or less. Indicator N of orientation of crystallographic planes {110} of gold is more than 1. The specified indicator N is the most among indicators N of orientation of all crystallographic planes of gold, based on the ratio of diffraction intensity of each of crystallographic planes of gold, obtained using X-ray diffraction for the surface to be sprayed. The method for the manufacture of a golden sprayed target includes preparation of a golden billet from a gold bar, processing of the golden billet to obtain a plate golden sprayed target or to obtain a tubular golden sprayed target, and thermal processing.

EFFECT: when depositing Au film, using the above-mentioned golden sprayed target, Au film is obtained, satisfying requirements of uniformity of distribution of a film thickness.

13 cl, 15 tbl, 29 ex