FIELD: methods of surface inspection.
SUBSTANCE: surface to be inspected is irradiated with light source, for example, with laser radiation source. Reflected signals are registered and processed. Channel of light beam is blown through with air jet directed in alignment to light source. Relation of parameters in air jet is assigned correspondingly to given formula. Contact-free inspection can be used at hazardous atmospheric conditions or in dusted environment containing impurities of hard particles or liquid drops.
EFFECT: improved quality of measurement; improved truth of results of measurements; improved efficiency.
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Authors
Dates
2006-04-20—Published
2004-08-17—Filed