METHOD FOR PLASMA PRODUCTION OF COATING FROM NANO-SIZED PARTICLES AND DEVICE FOR PLASMA PRODUCTION OF COATING FROM NANO-SIZED PARTICLES FOR IMPLEMENTING METHOD Russian patent published in 2024 - IPC C23C16/455 C23C16/458 C23C16/54 B82Y30/00 

FIELD: plasma technology; coatings.

SUBSTANCE: method for plasma production of a coating from nano-sized particles and to a device for implementing this method. A mixture of precursors in a transport gas flow is supplied to a prechamber docked to a magnetohydrodynamic accelerator (MHD accelerator) to obtain a flow of a mixture of these components. In the MHD accelerator, the flow of the specified mixture is accelerated with the generation of plasma for applying the specified coating, the speed of which at the exit from the MHD accelerator channel is in the range from 3 to 10 km/s. The synthesis and condensation of nano-sized particles is carried out in an expanding plasma flow flowing from the channel of the MHD accelerator. Application of nano-sized particles to the surface of the substrate is carried out with separation of nano-sized particles from the flow of transport gas. The said device contains a pre-chamber, an MHD plasma flow accelerator attached to it for coating, an accelerator power source and a movable substrate holder, on the surface of which the specified coating is obtained. The MHD accelerator contains a channel placed in a solenoid, formed by two flat dielectric disks with built-in anodes. In the said channel, there is a supersonic nozzle for accelerating the said mixture, which is configured to be used as a cathode.

EFFECT: plasma method produces a coating with good adhesion quality, increased homogeneity and roughness no worse than the initial roughness of the substrate.

6 cl, 5 dwg