PROCEDURE FOR POWDER MATERIALS GAS-DYNAMIC SPUTTERING AND DEVICE FOR ITS IMPLEMENTATION (VERSIONS) Russian patent published in 2010 - IPC C23C24/04 B05B7/10 

FIELD: metallurgy.

SUBSTANCE: invention refers to procedure of powder materials gas-dynamic sputtering and to device (versions) for its implementation and can be used in machine building, power engineering, metallurgy and other branches of industry. Flow with stable structure of specified configuration is shaped during gas-dynamic sputtering in accelerated gas flow in a sub-sonic or super-sonic section of a nozzle. Concentration of powder material is distributed in cross section of it so, as to facilitate corresponding configuration of a sputtering spot on a substrate. The device consists of the axis-symmetrical super-sonic nozzle with a prechamber and of unit supplying powder material into the super-sonic nozzle. The prechamber of the super-sonic nozzle is equipped with a replaceable insertion with a profiled channel, the shape of which determines the shape of a sputtered spot. According to another version there is a permeable section near a cut of the super-sonic nozzle of the device. The permeable section of the nozzle can be made in form of slits or hole perforation. The permeable section of the nozzle can be made out of porous gas permeable material.

EFFECT: expanded functionality and processability.

7 cl, 6 dwg