PLANT FOR APPLICATION OF COATS Russian patent published in 2006 - IPC C23C14/35 C23C14/54 

FIELD: devices for application of coats in vacuum; application of protective, reinforcing and decorative coats on inner surfaces of articles.

SUBSTANCE: vacuum chamber is provided with revolving substrate for placing the part to be treated and electric arc evaporator for metals. Evaporator consists of arc discharge non-magnetic cathode and anode. Cathode is made in form of cooled hollow cylinder made from evaporable material; control system for control of cathode spot motion in form of coil with solenoids is mounted inside this cylinder. Non-magnetic anode is made in form of vertical plates fitted over circumference along cathode embracing it. Cathode spot motion control unit consists of programmed unit, DC source with negative output for connection with part to be treated, arc current source and feedback unit whose output is connected to programmed unit and input is connected to DC source and output of arc current source. Hollow cylinder has semispherical top. Cathode spot motion control system is provided with magnetic circuit on which multi-sectional coil is fitted with solenoids located in its separate sections. Anode is provided with metal ring and length of vertical plates of anode exceeds length of cathode; plates copy its shape; they are interconnected in their upper parts by means of metal ring. Control unit is provided with adjustable multi-channel current source whose outputs are connected to respective sections of coil and its input is connected to output of programmed unit. Positive output of arc current source is connected to anode and positive output of DC source is connected to anode.

EFFECT: improved quality of coats due to enhanced reliability of cathode spot motion control system.

2 dwg