DEVICE FOR APPLICATION OF COATING WITH VACUUM-ARC EVAPORATION Russian patent published in 2019 - IPC C23C14/14 C23C14/35 C23C14/54 

FIELD: chemistry.

SUBSTANCE: invention relates to devices for application of coatings by vacuum-arc evaporation and can be used in production of tribotechnical articles and metal-cutting tools with functional coatings of alloyed carbide compounds. Device contains a vacuum chamber, a system for access to its internal volume, a gas supply system, a control system and a coating application system. Coating system includes a hollow cylindrical housing of the vacuum-arc evaporator connected to the vacuum chamber with a flange connection with an additional end flange. Housing body has an isolated ignition electrode current lead, an isolated anode current lead, an isolated target current of the target cathode, water inlet and outlet of the cooling system, magnetic conductor input and magnetic coil current leads. In the cavity of the housing there is an annular anode, a disk target cathode, a target cathode holder, two magnetic DC coils placed one after another coaxially to the target cathode. Butt of the ignition electrode is placed in the gap between the target cathode and its holder. Circular anode is installed in front of the disk target cathode and has a trapezoidal cross-section. Target cathode is connected by tight soldering with disc of nickel foil, which is also tightly soldered to holder of target cathode, made in form of ring with annular seal with evaporator housing. Internal volume of the evaporator casing behind the disk from nickel foil is filled with circulating water, the input of which is made through the magnetic conductor in the form of a hollow cylinder passing through the plug connected to the additional end flange. Magnet core accommodates sealed magnetic coils fed with direct current of opposite direction.

EFFECT: due to use of detachable arc evaporator, reduction of labour intensity of assembly-dismantling operations of target cathode, required temperature mode of cathode-target operation and high speed of cathode spot movement along cathode surface at optimum arched shape of magnetic field.

5 cl, 1 dwg