METAL PLASMA SOURCE (VERSIONS) Russian patent published in 2016 - IPC C23C14/24 C23C14/35 H01J37/34 

FIELD: technological processes.

SUBSTANCE: metal plasma source (MPS) comprises cooled cathode made of the evaporated metal installed in the vacuum chamber, anode in the form of vertical plates, and power supply connected with anode and cathode by current leads. MPS has screens and ion current sensors connected to power supply source. Cathode, according to one version, has an upturned U-shape. Screens are made in the form of plates arranged along the entire non-working surface of cathode. Two parallel plates are made repeating the shape of cathode and are connected by the plate located in the inner cavity of cathode, each base of which is connected with current lead.

EFFECT: invention can be used for application of protective, strengthening and decorative coatings by cathode spraying method on internal surfaces of the articles, in particular, on inner surfaces of rotation bodies, both opened and closed from one side.

2 cl, 3 dwg