EXTENDED ELECTRIC ARC EVAPORATOR OF CURRENT-CONDUCTING MATERIALS Russian patent published in 2024 - IPC C23C14/56 C23C14/24 

FIELD: various technological processes.

SUBSTANCE: invention relates to device for electric arc evaporation of current-conducting material in vacuum. Said device comprises a vacuum chamber, which is an anode, cooled cathode of electric arc discharge, elongated along its longitudinal axis, made of evaporated current-conducting material and having a working evaporation surface arranged along the longitudinal axis and equipped with a screen. Screen is made of two equal-height walls, wherein walls are made of metal plates coated with electrically insulating layer on inner surface and secured via ceramic insulating elements to evaporator base on posts coated with electrically insulating layer and arranged in gap between screen plates. U-shaped cross-section plug is installed on the upper end of the screen. Dimensions of screen walls, metal plates, gaps between said metal plates and the size of the gap between the walls of the screen and the post are configured to protect the inner surface of the screen from ingress of material evaporated from said cathode.

EFFECT: higher stability and reliability of processes of ion-plasma treatment and application of coating on parts of machines and devices.

4 cl, 3 dwg