FIELD: instrument engineering.
SUBSTANCE: method and device can be used for plasma treatment of object or particles being subject to treatment. Surface to be treated is subject to excitement or plasma is driven into acoustic oscillations to produce relative motion between plasma and surface to be treated. Energy for exciting oscillations in surface to be subject to treatment or to initialization of plasma oscillations is received due to process of plasma production. Pause between generation pulses of oscillation is set to be longer than time being necessary for particles to achieve stable or meta-stable condition.
EFFECT: widened functional capabilities.
53 cl, 16 dwg
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