FIELD: sensing systems.
SUBSTANCE: proposed temperature sensing system has AlN substrate 4, W layer 2 covering this substrate, signal source designed to feed exciting electric signal to W layer, and sensor designed to sense W layer response. W layer can incorporate thin film with different types of shielding layers on top of this film. W layer of flat heater has plurality of conducting strips distributed throughout substrate, strips being parallel and snake-like for rectangular substrate. Method for sensing temperature includes supply of exciting electric signal to W layer 2 on AlN substrate 4 and response of mentioned W layer to mentioned exciting signal.
EFFECT: enhanced stability of temperature sensing system.
12 cl, 26 dwg
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