AIR CONDITIONING METHOD AND DEVICE FOR SEMICONDUCTOR WAFERS AND/OR HYBRID INTEGRATED CIRCUITS Russian patent published in 2006 - IPC H01L21/00

Abstract RU 2284609 C2

FIELD: air conditioning for semiconductor wafers and/or hybrid integrated circuits.

SUBSTANCE: proposed method includes preparation of at least partially closed space 1 accommodating unit 10 to receive wafer or hybrid integrated circuit and passage of dry fluid through unit 10 to control its temperature. At least part of fluid leaving unit 10 is used for air conditioning in mentioned space 1. In addition, invention specification includes air conditioner description.

EFFECT: enhanced efficiency of air conditioning.

20 cl, 5 dwg

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RU 2 284 609 C2

Authors

Rajtinger Ehrikh

Dates

2006-09-27—Published

2003-04-15—Filed