FIELD: investigating or analyzing materials.
SUBSTANCE: device comprises chambers for applying coating arranged in serried one after another. The chambers are separated with baffles whose free faces are located immediately under the substrate that moves from one chamber to the other. The free faces of the baffles are provided with devices for measuring optical properties of the substrates.
EFFECT: improved control of coating.
11 cl, 33 dwg
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Authors
Dates
2006-10-20—Published
2004-12-27—Filed