DEVICE FOR APPLYING COATING Russian patent published in 2006 - IPC G01N21/86 

Abstract RU 2285912 C2

FIELD: investigating or analyzing materials.

SUBSTANCE: device comprises chambers for applying coating arranged in serried one after another. The chambers are separated with baffles whose free faces are located immediately under the substrate that moves from one chamber to the other. The free faces of the baffles are provided with devices for measuring optical properties of the substrates.

EFFECT: improved control of coating.

11 cl, 33 dwg

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RU 2 285 912 C2

Authors

Lotts Gans-Georg

Zauehr Peter

Khajn Shtefan

Skuk Peter

Dates

2006-10-20Published

2004-12-27Filed