FIELD: process engineering.
SUBSTANCE: invention relates to vacuum deposition of sandwiched nanometer-depth coatings used as, for example, spectral filters for optical instruments. Proposed method comprises measurement of transmission spectrum of coating applied on check substrate in wide spectral range and calculation of sprayed ply depth. It differs from know processes in that said check substrate is provided with pre-applied ply of preset depth to ensure at least one local extremum or at least one inflection in spectrum of reflection and/or transmission.
EFFECT: ply depth measurement can be made at measurement of reflection and transmission spectra.
5 cl, 4 dwg
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