FIELD: production of diamond layers.
SUBSTANCE: diamond layer at thickness more than 2 mm is obtained through chemical deposition from gaseous phase. Method includes homo-epitaxial growth of diamond layer on surface of backing at low level of defects in atmosphere containing nitrogen at concentration lesser than 300 billion parts of nitrogen.
EFFECT: improved quality of diamond layers.
36 cl, 10 dwg, 1 tbl, 4 ex
Title | Year | Author | Number |
---|---|---|---|
MONO-CRYSTAL DIAMOND PRODUCED BY CHEMICAL DEPOSITION METHOD FROM GAS PHASE AND METHOD OF PRODUCTION OF SUCH DIAMOND | 2001 |
|
RU2288302C2 |
BORON-ALLOYED DIAMOND | 2002 |
|
RU2315826C2 |
COLOURLESS DIAMOND LAYER | 2006 |
|
RU2415204C2 |
COLOURLESS MONOCRYSTALLINE DIAMOND AND METHOD FOR PRODUCTION THEREOF | 2006 |
|
RU2473720C2 |
METHOD OF PROCESSING MONOCRYSTALLINE CVD-DIAMOND AND OBTAINED PRODUCT | 2010 |
|
RU2540611C2 |
OBTAINED BY CHEMICAL DEPOSITION FROM VAPOR PHASE MONOCRYSTALLINE SYNTHETIC DIAMOND MATERIALS, WHICH HAVE UNIFORM COLOUR | 2013 |
|
RU2595671C1 |
METHOD OF PROCESSING MONOCRYSTALLINE CVD-DIAMOND AND THE OBTAINED PRODUCT | 2010 |
|
RU2580916C1 |
OPTICAL QUALITY DIAMOND MATERIAL | 2003 |
|
RU2332531C2 |
MONOCRYSTALLINE SYNTHETIC DIAMOND MATERIAL OBTAINED BY CHEMICAL DEPOSITION FROM GAS PHASE | 2017 |
|
RU2705356C1 |
SYNTHETIC CVD DIAMOND | 2010 |
|
RU2516574C2 |
Authors
Dates
2006-11-10—Published
2001-06-14—Filed