MONOCRYSTALLINE SYNTHETIC DIAMOND MATERIAL OBTAINED BY CHEMICAL DEPOSITION FROM GAS PHASE Russian patent published in 2019 - IPC C30B29/04 C30B25/22 C30B25/20 C30B33/02 C30B33/04 C23C16/27 C01B32/26 C01B32/28 A44C17/00 G02F1/00 

FIELD: technological processes.

SUBSTANCE: invention relates to synthesis of monocrystalline CVD diamond material, which can be used in optics, jewelry, as substrates for further CVD growth of diamonds, mechanical applications, in quantum probing and information processing. Disclosed is monocrystalline CVD diamond material containing total nitrogen concentration of at least 3 million^-1, measured by secondary ion mass spectrometry (SIMS); and low optical birefringence, such that in the single crystal CVD diamond material sample having an area of at least 1.3 mm × 1.3 mm and measured using pixel size with area in range of 1×1 mcm² up to 20×20 mcm², maximum value Δn_[average] does not exceed 1.5×10^-4, where Δn_[average] is the average value of the difference between the refraction index for light polarized along the slow and fast axes averaged over the thickness of the sample. Method of making diamond material involves preparing a plurality of monocrystalline diamond substrates by machining, etching substrates to remove damage occurring during machining, wherein the growth surface of each substrate has such a density of defects that the features of etching the surface relating to defects formed by detecting plasma-chemical etching are less than 5×10³/mm²; growing a first layer of monocrystalline CVD diamond material on the growth surface of each monocrystalline diamond substrate and growing a second layer of monocrystalline CVD diamond material on a first layer of monocrystalline CVD diamond material, wherein second layer of monocrystalline CVD diamond material is grown under conditions of higher concentration of nitrogen than first layer of monocrystalline CVD diamond material, so that synthesis atmosphere contains more than 5 million^-1 nitrogen.

EFFECT: invention enables to obtain a high-quality monocrystalline CVD diamond product in the form of thick layers with high nitrogen concentrations, but with low birefringence and low deformation.

18 cl, 1 dwg