ELECTRIC - ARC GENERATOR OF SEPARATED FLOWS OF METAL PLASMA IN VACUUM Russian patent published in 2006 - IPC C23C14/35 

FIELD: procedures for applying strengthening, protecting and decorative coatings in vacuum onto different articles for imparting to surfaces of said articles improved functional properties, namely electric arc generator for creating separated flows of metal plasma in vacuum.

SUBSTANCE: cooled cathode 6 is made of material evaporated from its end surface during electric arc erosion process. Cylindrical cooled anode 1 embraces cathode 6. On outer surface of anode 1 stabilizing electromagnet 8 is mounted. Additional coaxial cooled anode 2 is arranged between plane of cross section of end consumable surface of cathode 6 and flange of chamber. Flange inner surface has curvilinear profile whose cross section narrows and then enlarges and on outer surface of which focusing electromagnet 9 is arranged. Inner surface of additional anode 2 is provided with set of annular rectangular protrusions 3 with height h = (4.0 - 8.0) mm and width d = (10.0 - 20.0) mm between them. Diameter of inner opening of anode 2 in zone of its least cross section consists of (1.2 - 1,8) Dc while said cross section is spaced by distance (2.3 - 3.5) Dc where Dc - diameter of end consumable surface of cathode 6. In outlet portion of least cross section of anode spaced by distance L from cathode 6 there is attenuating member 4 having set of plane-parallel plates 5. Planes of plates 5 are horizontal and parallel to axis of apparatus while they are spaced one from other by distance D ≥10 mm; width of plates H ≤ 1.4 D. Distance L is determined according to relation: 0.4 = (H² + 2HL)/(H + D); 0.2 m ≤ L ≤ 0.4 m.

EFFECT: improved quality of coating, lowered quantity of micro-drop phase without significant decrease of ion phase quantity in plasma flow.

3 dwg, 1 tbl