METHOD FOR VACUUM COATING ON THE INNER SURFACE OF LONG CYLINDRICAL PRODUCTS Russian patent published in 2022 - IPC C23C14/04 C23C14/28 

FIELD: material engineering.

SUBSTANCE: invention relates to the field of vacuum ion-plasma technologies and can be used in mechanical engineering and electronics, for example, for applying a suppressor coating on cylindrical anodes of high-power generator lamps. The plasma flow of the applied material is generated as a result of the excitation of a vacuum-arc discharge between the consumable cathode 2 and the anode 1. Under the influence of the magnetic field of the coil 5, cathode spots from the side surface of the cathode 2 move to its end surface. The plasma flow under the influence of the magnetic field of the focusing coil 6 is directed into the cylindrical cavity 8 of a long-length product located in a vacuum chamber 7. Along the axis of the cylindrical cavity 8, a barrier 9 is installed in the form of, for example, a disk whose diameter is close to the inner diameter of the cylindrical cavity 8. The barrier 9 is moved along the axis of the cylindrical cavity 8 from the entrance in the direction of to its end at a speed decreasing as it moves according to the formula:

where V(z) is the speed of movement of the barrier inside the cavity at the point with the z coordinate, m/ s; z is the coordinate of the point along the axis of the cavity from the entrance to its end; V₀ is the speed of the disk at the beginning of the cavity, m/s; k is the Boltzmann constant, J⋅K^-1; T_e is the temperature of the electronic component of the plasma, K; M_i is the ion mass, kg; V_pl is the speed of a homogeneous plasma flow at the entrance to the cavity, m/s; r₀ is the radius of the cylindrical cavity, m. The flow of ions of the applied material condenses on the inner surface of the cavity 8.

EFFECT: high uniformity of coating is ensured along the entire length of a long cylindrical product with high process productivity.

1 cl, 2 dwg