METHOD OF MAKING COATS IN VACUUM, DEVICE FOR MAKING SUCH COATS AND METHOD OF MANUFACTURE OF SAID DEVICE Russian patent published in 2001 - IPC

FIELD: making of coats from metals, alloys, dielectrics, semiconductors and superconductors in electronic industry, space and atomic engineering, as well as in mechanical engineering and optical industry. SUBSTANCE: firing the discharge in generation zone is effected by means of defocused laser beam whose duration τ_gen is determined from relationship τ_gen≫ τ_las and by matching directional pattern of laser plasma flow with area of forming electrode gap break-down channel followed by superimposing magnetic fields on generation, transportation and condensation areas and distributing magnetic fluxes is generation, transportation and condensation areas in such way that anode part of discharge is used for partial closing of magnetic flux at which positive jump of optimal potential is formed; magnetic flux through profiled surface radially bounding the transportation area is equal to zero and magnetic flux in condensation area is equal to longitudinal magnetic flux in transportation area; ion component of plasma is directed to condensation surface and is separated from drop phase at transportation state in Langmuir layer area. Device for realization of said method is additionally provided with ion separator by transverse momenta and synchronizing unit; firing unit is provided with diaphragm having hole lying in one optical axis with end working surface of consumable cathode and input port at distance from lens which is equal to focal distance of focusing system lens. Plasma conduit body is made in form of screw cylinder formed by motion of ring over helical line on cylinder; profile of inner surface of body is triangular in shape. Electromagnetic system has two coils: one coil is connected in series in pumping circuit of laser radiator and second coil is connected in series in plasma generator discharge circuit. Device is provided with additional plasma ion separator by transverse momenta located in area of outlet end face of plasma conduit, additional plasma generator, plasma conduits, firing units, ion mixing chambers by transverse moment and synchronizing units. Method of manufacture of device for making coats realizes optimal conditions of construction of helical plasma-optical system and mixing chamber. EFFECT: enhanced efficiency. 23 cl, 32 dwg