FIELD: electric engineering.
SUBSTANCE: device for measuring pressure has two piezoelectric plates; surface acoustic wave resonator is formed onto any plate. Measuring unit is introduced additionally. Measuring unit has resonator's initial frequency metering unit and capacitance meter. Measuring unit is connected with piezoelectric plates. Two pairs of electrodes of capacitive pick-us are formed onto any piezoelectric plates - one electrode at each side of any piezoelectric plate. Piezoelectric plates are connected together to form space between them; there are electrodes inside the space. Inter-electrode capacity between electrodes changes when piezoelectric plate bends to receive perceive pressure. Measuring unit is made to receive signal from resonator which perceives change in temperature.
EFFECT: increased precision of measurement; longer stability of characteristics.
2 dwg
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Authors
Dates
2007-02-10—Published
2005-05-30—Filed