FIELD: instrument industry.
SUBSTANCE: gyroscope comprises the piezoelectric plate, converters of surface acoustic waves applied on the plate, converters of sensing member of the oscillation caused by the surface acoustic waves, and reflecting structures arranged out of the converters. The semiconducting plate is mounted parallel to the piezoelectric plate at a distance of no more than 10 μm and is connected with a power source. At least one diode is connected between the converters of the sensing member of surface acoustic waves. The piezoelectric plate is made of a diaphragm whose thickness is 0.1-10 μm.
EFFECT: enhanced precision and sensitivity.
1 cl, 2 dwg
Title | Year | Author | Number |
---|---|---|---|
GYROSCOPE ACCELEROMETRE | 2008 |
|
RU2381510C1 |
PRIMARY SENSITIVE ELEMENT FOR MEASUREMENT OF GAS AND LIQUID PRESSURES, POINT FORCES | 2006 |
|
RU2327126C2 |
GYROSCOPE OPERATING ON ACOUSTIC SURFACE WAVES | 2009 |
|
RU2390727C1 |
TWIST GYROSCOPE | 2009 |
|
RU2387951C1 |
MICRO-ACOUSTIC-ELECTROMECHANICAL GYROSCOPE AND OPERATION METHOD THEREOF | 2009 |
|
RU2389000C1 |
RESONANT GYROSCOPE ON SUPERFICIAL ULTRASONIC WAVES WITH PARTITIONING OF FREQUENCIES | 2007 |
|
RU2347189C1 |
SENSITIVE ELEMENT OF GYROSCOPE ON SURFACE ACOUSTIC WAVES | 2007 |
|
RU2335739C1 |
VIBRATING GYROSCOPE USING SUPERFICIAL ULTRASONIC WAVES | 2007 |
|
RU2348902C1 |
GYROSCOPE OPERATING AT ACOUSTIC SURFACE WAVES | 2006 |
|
RU2329466C1 |
ELECTRONIC GYRO | 2007 |
|
RU2357212C1 |
Authors
Dates
2007-11-10—Published
2006-03-29—Filed