FIELD: measuring technology.
SUBSTANCE: invention refers to instrument engineering, namely to mobile objects orientation, navigation devices and control systems and is intended for rotation and linear acceleration sensing. A gyroscope accelerometre comprises a driver and interconnected at least one deformation-sensitive element and at least one inertial mass. The deformation-sensitive element is made of a piezoelectric material and accommodates on its surface at least one formed interdigital transducer and at least one reflecting structure. The driver is made of the piezoelectric material. The interdigital transducer and reflecting structures form at least one acoustic surface-wave delay line.
EFFECT: higher measurement accuracy and sensitivity.
7 cl, 2 dwg
| Title | Year | Author | Number |
|---|---|---|---|
| SURFACE ACOUSTIC WAVE OPERATED GYROSCOPE | 2006 |
|
RU2310165C1 |
| DEFORMATION DETECTING ELEMENT WITH DISPERSION STRUCTURES | 2008 |
|
RU2396526C2 |
| SURFACE-ACOUSTIC-WAVE RESONATOR WITH GROOVES | 2008 |
|
RU2366078C1 |
| DETECTING ELEMENT FOR MEASURING MECHANICAL STRESS | 2010 |
|
RU2435148C1 |
| PRIMARY SENSITIVE ELEMENT FOR MEASUREMENT OF GAS AND LIQUID PRESSURES, POINT FORCES | 2006 |
|
RU2327126C2 |
| SENSITIVE ELEMENT FOR TEMPERATURE MEASUREMENT | 2012 |
|
RU2494358C1 |
| METHOD OF GENERATING INTERROGATION SIGNAL FOR SAW SENSOR WITH REFLECTING STRUCTURES | 2012 |
|
RU2488921C1 |
| RESONATOR ON SURFACE ACOUSTIC WAVES | 2017 |
|
RU2643501C1 |
| VIBRATING GYROSCOPE USING SUPERFICIAL ULTRASONIC WAVES | 2007 |
|
RU2348902C1 |
| DETECTING ELEMENT FOR MEASURING PHYSICAL QUANTITIES | 2009 |
|
RU2418276C1 |
