PRIMARY SENSITIVE ELEMENT FOR MEASUREMENT OF GAS AND LIQUID PRESSURES, POINT FORCES Russian patent published in 2008 - IPC G01L9/12 

FIELD: mechanical engineering; measurement equipment.

SUBSTANCE: invention is related to the sphere of measurement equipment and may be used in instrument-making and machine building for measurement of pressures of gas, liquids, point forces. Primary sensitive element consists of two piezo-cards, on the internal side of each one of which there are interdigital transducers formed, which create membrane box by means of vacuum-tight adhesion of mentioned piezo-cards with interdigital transducers inside. As measurement signal, signal phase change is used in case of pressure change. Additionally electrodes of electrostatic driver are formed - one on every piezo-card internal side. On external side of piezo-card, which directly perceives pressure, at least one deepening is arranged. The thickness of piezo-card, which directly perceives pressure, in the point of fixing to the second piezo-card, is more than the least thickness of mentioned piezo-card, which directly perceives pressure. One of piezo-cards may be fixed as cantilever to the second piezo-card without sealing.

EFFECT: increase of pressure measurement accuracy.

2 cl, 2 dwg