INTEGRATING MICRO-MECHANICAL VIBRATION GYROSCOPE Russian patent published in 2007 - IPC G01C19/56 

FIELD: gyroscopes.

SUBSTANCE: gyroscope can be used in different purpose movable objects control systems, particularly, in systems for controlling high-dynamic objects rotating at high speed, as well as angular movement indicators. Integrating micro-mechanical vibration gyroscope has sensitive element made onto silicon crystalline substrate. Axis-symmetrical suspension with inertial mass is formed in substrate. Suspension is made in form of elastic identical members to imply two degrees of freedom to inertial mass when it moves straight along surface of substrate. Gyroscope also has magnetic-electric system for exciting and keeping vibration movement of inertial mass, induction system for measurement o of shifts of inertial mass; magneto-electric system and induction systems are made in form of magnet enclosed into magnetic circuit. Gyroscope also has conductors of excitation system and keeping of vibration movement of inertial mass and induction system to measure shifts of inertial mass. Number of elastic members in suspension is multiple to number of maximums or minimums of value of elasticity module in crystallographic directions belonging to crystallographic plane which coincides with plane of substrate. Elastic members are disposed symmetrically in relation to center of suspension along directions which go from center of suspension and which oriented at angles of 360°(kn) t each other, where k is number of maximums or minimums of elasticity module value in crystallographic plane, which coincides with plane of substrate, and n is integer number of 1, 2, 3. Conductors of systems for exciting and keeping vibration movement of inertial mass and working pars of conductors of induction system intended for taking readings of movements of inertial mass are disposed onto inertial mass inside working space of magnetic circuit between its tips. Peripheral part of induction system intended for taking reading is disposed onto inertial mass outside area of working space of magnetic circuit. Cross-section of working space is made profiled.

EFFECT: improved precision.

9 dwg