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2 248 525

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Application

2004101707/28, 2004-01-22

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Start date

2004-01-22

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Actual filing date

2004-01-22

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Published

2005-03-20

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Inventor

Rubchits V.G.Kalugin V.V.Lapenko V.N.Shilov V.F.Plekhanov V.E.Tikhonov V.A.Zotov S.A.Timoshenkov S.P.Maksimov V.N.

(73)

Holder

Gosudarstvennoe Obrazovatel'Noe Uchrezhdenie Vysshego Professional'Nogo Obrazovanija Gosudarstvennyj Institut Ehlektronnoj Tekhniki Universitet)"

MICROMECHANICAL VIBRATORY GYROSCOPE AND METHOD OF ITS MANUFACTURE Russian patent published in 2005 - IPC

Abstract RU 2248525 C1

FIELD: gyro-inertial instruments; control systems of mobile objects.

SUBSTANCE: proposed micromechanical vibratory gyroscope has inertial mass suspended in housing by means of frames and cruciform torsion bars; joint areas of torsion bars with frames are provided with lugs formed over crystallographic planes; external and internal angles between faces of torsion bars are rounded-off and surfaces of torsion bars are polished. Mechanical structure of gyroscope is formed from mono-crystal silicon by successive three kinds of etching: plasma-chemical etching, anisotropic etching and isotropic etching.

EFFECT: enhanced sensitivity and strength relative to linear overloads; enhanced reliability.

3 cl, 6 dwg

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RU 2 248 525 C1

Authors

Rubchits V.G.

Kalugin V.V.

Lapenko V.N.

Shilov V.F.

Plekhanov V.E.

Tikhonov V.A.

Zotov S.A.

Timoshenkov S.P.

Maksimov V.N.

Dates

2005-03-20—Published

2004-01-22—Filed