INTEGRATED SENSITIVE ELEMENT OF VIBRATION GYROSCOPE Russian patent published in 2012 - IPC G01C19/56 

FIELD: physics.

SUBSTANCE: integrated sensitive element of a vibration gyroscope has a glass base, a sensitive element-resonator in form of a thin-walled cylinder made from low-resistance monocrystalline silicon and an exciting and signal output circuit. Capacitive exciting and detachable transducers are in form of a comb lying on the outer side of the thin-walled cylinder, uniformly on its perimetre and on the inner side of the exciting and detachable electrodes. The technical result is achieved by simplifying the circuit and reducing errors using capacitive transducers which excite and output the signal, as well as increasing efficiency of using the capacitive transducer, creating a figure of oscillations without distortion and compensating for the effect of adverse factors. Electrodes, which are in form of a comb, increase efficiency of using the capacitive transducer. Absence of elastic coupling in the mode excitation plane enables to create a figure of oscillations without distortion. Mounting the resonator in the lower central part compensates for the effect of adverse factors.

EFFECT: high accuracy of the gyroscope.

2 dwg